Comparing to the routine experiment, this method need much less samples, much less test time, much lower cost, instead give much higher efficiency . the results have comparability with the results of the routine test method 與常規(guī)試驗對比證明,本試驗方法所需樣品少,測試時間短,成本低,效率高,試驗結(jié)果同常規(guī)方法有可比性。
Because the routine test method could not meet the requirement of modern devices, the author put forward a new test method called temperature ramp measurement ( trm ) . by this method, we can observe dynamically the whole process of devices " degradation, so the estimation value of life and failure active energy can be extracted accurately 針對目前常規(guī)評價方法不能適應(yīng)當(dāng)前微電子器件快速發(fā)展的需求,提出了恒定電應(yīng)力的溫度斜坡法(簡稱trm法),動態(tài)觀察和分析器件退化的全過程,應(yīng)用此方法給出了實驗樣品的失效激活能和壽命預(yù)測值,并與常規(guī)方法進行了比較,得到了比較一致的結(jié)果。